Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

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Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

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Authors

Ali Mahmoodinezhad

Carlos Alvarado Chavarin

Markus Andreas Schubert

Christian Wenger

Dataset

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Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

(MDPI AG, 2023) Carlos Morales; Ali Mahmoodinezhad; Rudi Tschammer; Julia Kosto; Carlos Alvarado Chavarin; Markus Andreas Schubert; Christian Wenger; Karsten Henkel; Jan Ingo Flege

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https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/4982

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