Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates

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Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates

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Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates

(MDPI AG, 2024) Yujie Yan; Jun Huang; Lei Pan; Biao Meng; Qiangmin Wei; Bing Yang

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https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/10196

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Name:: inorganics-12-08-00207.xml
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Format:: Extensible Markup Language