Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

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Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

Format

pdf

Authors

Ali Mahmoodinezhad

Carlos Alvarado Chavarin

Markus Andreas Schubert

Christian Wenger

Dataset

Dataset

Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

(MDPI AG, 2023) Carlos Morales; Ali Mahmoodinezhad; Rudi Tschammer; Julia Kosto; Carlos Alvarado Chavarin; Markus Andreas Schubert; Christian Wenger; Karsten Henkel; Jan Ingo Flege

URI

https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/4981

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Name:: inorganics-11-12-00477.pdf
Size:: 1.95 MB
Format:: Adobe Portable Document Format