Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates
datacite.relatedItem.firstPage | 477 | |
datacite.relatedItem.issue | 12 | |
datacite.relatedItem.relatedIdentifierType | ISSN | |
datacite.relatedItem.relatedItemIdentifier | 2304-6740 | |
datacite.relatedItem.relationType | IsPublishedIn | |
datacite.relatedItem.title | Inorganics | |
datacite.relatedItem.volume | 11 | |
dc.contributor.author | Carlos Morales | |
dc.contributor.author | Ali Mahmoodinezhad | |
dc.contributor.author | Rudi Tschammer | |
dc.contributor.author | Julia Kosto | |
dc.contributor.author | Carlos Alvarado Chavarin | |
dc.contributor.author | Markus Andreas Schubert | |
dc.contributor.author | Christian Wenger | |
dc.contributor.author | Karsten Henkel | |
dc.contributor.author | Jan Ingo Flege | |
dc.date.accessioned | 2024-08-15T13:12:51Z | |
dc.date.available | 2024-08-15T13:12:51Z | |
dc.date.issued | 2023 | |
dc.identifier.doi | https://doi.org/10.3390/inorganics11120477 | |
dc.identifier.other | jz000076-0467 | |
dc.identifier.uri | https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/4980 | |
dc.publisher | MDPI AG | |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | |
dc.subject.ddc | 540 | |
dc.title | Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates | |
dc.type | Article | |
dcat.distribution.pdf | https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/4981 | |
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