Xinlong HuangYouchao QiTianzhao BuXinrui LiGuoxu LiuJianhua ZengBeibei FanChi Zhang2024-04-302024-04-30https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/1801Overview of Advanced Micro-Nano Manufacturing Technologies for Triboelectric Nanogeneratorspdf