Atomic Layer Deposition of Lithium Fluoride Optical Coatings for the Ultraviolet

John HennessyShouleh Nikzad2024-08-152024-08-152018jz000079-0051https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/6634540Atomic Layer Deposition of Lithium Fluoride Optical Coatings for the UltravioletArticlehttps://doi.org/10.3390/inorganics6020046