Xinlong HuangYouchao QiTianzhao BuXinrui LiGuoxu LiuJianhua ZengBeibei FanChi Zhang2024-04-302024-04-302022jz000042-0007https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/1800600Overview of Advanced Micro-Nano Manufacturing Technologies for Triboelectric Nanogeneratorshttps://doi.org/10.3390/nanoenergyadv2040017