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MDPI AG
Periodika
Inorganics
2024
Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates
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PDF
Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates
Format
pdf
Authors
Yujie Yan
Jun Huang
Lei Pan
Biao Meng
Qiangmin Wei
Bing Yang
Journal ISSN
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Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates
(
MDPI AG
,
2024
)
Yujie Yan
;
Jun Huang
;
Lei Pan
;
Biao Meng
;
Qiangmin Wei
;
Bing Yang
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URI
https://tustorage.ulb.tu-darmstadt.de/handle/tustorage/10195
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inorganics-12-08-00207.pdf
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