Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates

datacite.relatedItem.firstPage207
datacite.relatedItem.issue8
datacite.relatedItem.relatedIdentifierTypeISSN
datacite.relatedItem.relatedItemIdentifier2304-6740
datacite.relatedItem.relationTypeIsPublishedIn
datacite.relatedItem.titleInorganics
datacite.relatedItem.volume12
dc.contributor.authorYujie Yan
dc.contributor.authorJun Huang
dc.contributor.authorLei Pan
dc.contributor.authorBiao Meng
dc.contributor.authorQiangmin Wei
dc.contributor.authorBing Yang
dc.date.accessioned2024-09-13T09:51:58Z
dc.date.available2024-09-13T09:51:58Z
dc.date.issued2024
dc.identifier.doihttps://doi.org/10.3390/inorganics12080207
dc.identifier.otherjz000077-0199
dc.identifier.urihttps://tustorage.ulb.tu-darmstadt.de/handle/tustorage/10194
dc.publisherMDPI AG
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subject.ddc540
dc.titleInvestigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates
dc.typeArticle
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